Electrical & Computer Engin 571 - Microelectronic Fabrct
Spring
2013
01
4.00
Qiangfei Xia
TU TH 8:00AM 9:15AM
UMass Amherst
15258
With lab. Semiconductor instructional processing laboratory (SIPL) and lectures. Principles and practice of modern microelectronic silicon device processing. Theory and practice of basic processing technology including photo-lithography, oxidation, diffusion, thin film deposition, ion implantation, packaging, yield, and process integration. State-of-the-art laboratory fabrication of working microelectronic devices and process simulation techniques. Prerequisite: E&C-ENG 344.
Open to Seniors and Graduate students only. Pre Req: E&C-ENG 344