Mechanical & Industrial Engrg 597ME - ST-Intro/MEMS & Microsciences

Introduction to general manufacturing methods for Micro Electromechanical Systems (MEMS) with emphasis on concepts, physics, and instruments of various micro/nano-fabrication techniques that have been widely used in industry and academia. Topics include: 1. MEMS fabrication: lithography technologies, physical and chemical deposition methods, and physical and chemical etching methods, process integration, etc. 2. MEMS physics: Scaling laws, material properties, forces, microfluidics, interfacial phenomenon, etc.; 3. MEMS applications: MEMS devices and applications for automobile, mobile devices, super-repellent surfaces, and soft electronics.