Mechanical & Industrial Engrg 697ME - ST-Intro/MEMS & Microsciences

Introduction to general manufacturing methods for Micro Electromechanical Systems (MEMS) with emphasis on concepts, physics, and instruments of various micro/nano-fabrication techniques that have been widely used in industry and academia. Topics include: 1. MEMS fabrication: lithography technologies, physical and chemical deposition methods, and physical and chemical etching methods, process integration, etc. 2. MEMS physics: Scaling laws, material properties, forces, microfluidics, interfacial phenomenon, etc.; 3. MEMS applications: MEMS devices and applications for automobile, mobile devices, super-repellent surfaces, and soft electronics.

Additional requirement for graduate student 697ME: Literature review: advanced MEMS manufacturing techniques beyond lecture; Personal project: Record 1-2 narrated videos from daily life related to microscale interfacial phenomena or microscale science; Group project (2-3 persons): presentation on one MEMS research topics/applications, e.g., bio-MEMS, power-MEMS, etc.