Electrical & Computer Engin 571 - Microelectronic Fabrct
Spring
2020
01
4.00
Qiangfei Xia
TU TH 8:30AM 9:45AM
UMass Amherst
41681
Engineering Laboratory rm 325
qxia@umass.edu
With lab. Semiconductor instructional processing laboratory (SIPL) and lectures. Principles and practice of modern microelectronic silicon device processing. Theory and practice of basic processing technology including photo-lithography, oxidation, diffusion, thin film deposition, ion implantation, packaging, yield, and process integration. State-of-the-art laboratory fabrication of working microelectronic devices and process simulation techniques. Prerequisite: E&C-ENG 344.
Open to Seniors and Graduate students only. Pre Req: E&C-ENG 344
https://spire.umass.edu
Multiple required components--lab and/or discussion section. To register, submit requests for all components simultaneously.