Electrical & Computer Engin 597MF - ST-Intro/Microelec Fabrication

Spring
2021
01
3.00
Qiangfei Xia
TU TH 8:30AM 9:45AM
UMass Amherst
84836
Fully Remote Class
qxia@umass.edu
Principles of modern microelectronic silicon device processing. Theory of basic processing technology including photo-lithography, oxidation, diffusion, thin film deposition, ion implantation, packaging, yield, and process integration. Virtual state-of-the-art fab tour and processing simulation techniques.
Pre Req: E&C-ENG 344 ECE344 or permission of instructor.
Students may fulfill one elective requirement using either ECE 597MF or ECE 571.
Permission is required for interchange registration during the add/drop period only.
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