Mechanical & Industrial Engrg 640 - Intro Micro/NanoScaleManuf&Sci

Fall
2025
01
3.00
Tingyi Liu

M W 4:00PM 5:15PM

UMass Amherst
69344
Engineering Laboratory rm 325
leoliu@umass.edu
Introduction to general micro and nano manufacturing methods, i.e., Micro Electromechanical Systems (MEMS), with emphasis on concepts, physics, and instruments of various micro/nano-fabrication techniques that have been widely used in industry and academia. The course contains three main modules: MEMS fabrication, MEMS physics, and MEMS application.

Open to graduate students in Mechanical Engineering.

Permission is required for interchange registration during the add/drop period only.
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