Biomedical Engineering 519 - Intro/MEMS & Microbots

This course provides a comprehensive introduction to the principles, fabrication technologies, modeling, and analysis of micro-electro-mechanical systems (MEMS). Core topics include microfabrication processes, MEMS materials, microscale sensing and actuation mechanisms, and analytical and numerical modeling techniques relevant to small-scale systems. The course further introduces microrobotics, which studies robotic systems at the micron scale capable of interacting with and manipulating microscale objects. Students will learn how MEMS and micro- and nanofabrication technologies enable the design and fabrication of microrobots, microsensors, and microactuators. Applications in micromanipulation, including microassembly, cell manipulation, and biomedical microrobotic systems, are emphasized. Through lectures, case studies, and team-based projects, students will develop both theoretical understanding and practical insight into the design, fabrication, and application of MEMS and microrobotic systems.

BMED/CE-ENGIN 241, MIE 211 Co-requisites: ECE 361 or BME 320, or equivalent