Electrical & Computer Engin 571 - Microelectronic Fabrct

With lab. Semiconductor instructional processing laboratory (SIPL) and lectures. Principles and practice of modern microelectronic silicon device processing. Theory and practice of basic processing technology including photo-lithography, oxidation, diffusion, thin film deposition, ion implantation, packaging, yield, and process integration. State-of-the-art laboratory fabrication of working microelectronic devices and process simulation techniques.

Open to Seniors and Graduate students only. Pre Req: E&C-ENG 344 Prerequisites: E&C-ENG 344 or an equivalent course on semiconductor devices.