ADV TOPIC: MEMS & MICRO-SCALE
Miniature and micro-scale devices have applications ranging from the navigation system in your phone to disease diagnosis at your doctor's office. The goals of this course are to introduce the fabrication techniques, models, and design process for sensors and actuators with micro-scale features. The course will also explore how electromechanical models that are applicable at the macro-scale can be modified to fit scaled down devices. Devices will be investigated through several topics including inertial sensors, chemical sensors, microfluidics, and emerging areas.