With lab. Semiconductor instructional processing laboratory (SIPL) and lectures. Principles and practice of modern microelectronic silicon device processing. Theory and practice of basic processing technology including photo-lithography, oxidation, diffusion, thin film deposition, ion implantation, packaging, yield, and process integration. State-of-the-art laboratory fabrication of working microelectronic devices and process simulation techniques. Prerequisite: E&C-ENG 344.